Bipolar Pulsed Dc Power Supply

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Bipolar pulsed dc power supply.

Bipolar pulsed power supplies model magpuls bp the bipolar pulsed power supplies model magpuls bp are constructed for plasma excitation with highest performance. Available for both dual pulsed and single pulsed magnetron sputtering applications. The bipolar pulsed power supply is a modular designed system consisting of the dc power unit and the bipolar pulse unit which switches the voltage with a freely adjustable pulse of. Mks rpdg generators provide asymmetric bipolar and unipolar pulsed dc power for reactive pvd physical vapor deposition cvd chemical vapor deposition bias and enhancement coating applications.

Since the second half of 2006 we developed our own design of asymmetric bipolar pulsed bias power supply. Achieve new levels of process performance using field proven bipolar dc pulsing technology. The rpdg line eliminates yield limiting factors thus enabling existing pvd tools to produce the high quality low defect films needed for next. Advanced energy pinnacle plus power supplies provide all the advantages of a pulsed dc solution for reactive processes in an easily integrated package that increases process efficiency reduces costs and offers superior flexibility and latitude.

The capacitor charging high voltage dc power supplies are designed specifically to the requirements of capacitor charging or capacitor conditioning i e. They have a more heavily designed output resistor to withstand a pulsed load and a regulating circuit optimized for fast switching over between current and voltage regulation and vice versa. Combining standard dc technology and our patented pulsed dc technology the pinnacle plus power supplies provide higher deposition rates. Advanced waveform control allows process fine tuning.

Structural characterization of the coatings was done. Ac bipolar pulsed power supply for reactive magnetron sputtering article pdf available in ieee transactions on plasma science 39 10 1983 1989 november 2011 with 529 reads how we measure. Dc power supplies for sputtering plants and ion sources pulse generators as one of the leading manufacturers of power supplies for thin film coating systems adl analoge und digitale leistungselektronik gmbh offers its customers innovative solutions for complex processes. An asymmetric bipolar pulsed dc power supply and a dc power supply were used to sputter si and ti targets respectively in ar n2 plasma.